BS EN 62047-4-2010 半导体装置.微电机装置.微电子机械系统(MEMS)一般规格

标准号：BS EN 62047-4-2010
中文标准名称：半导体装置.微电机装置.微电子机械系统(MEMS)一般规格
英文标准名称：Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS
标准类型：K24
发布日期：2010/11/30 12:00:00
实施日期：2010/11/30 12:00:00
中国标准分类号：K24
国际标准分类号：31.080.99
适用范围：This part of IEC 62047 describes generic specifications for micro-electromechanical systems(MEMS) made by semiconductors, which are the basis for specifications given in other partsof this series for various types of MEMS applications such as sensors, RF MEMS, excludingoptical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies generalprocedures for quality assessment to be used in IECQ-CECC systems and establishesgeneral principles for describing and testing of electrical, optical, mechanical andenvironmental characteristics.This part of IEC 62047 aids in the preparation of standards that define devices and systemsmade by micromachining technology, including but not limited to, material characterizationand handling, assembly and testing, process control and measuring methods. MEMSdescribed in this standard are basically made of semiconductor material. However, thestatements made in this standard are also applicable to MEMS using materials other thansemiconductor, for example, polymers, glass, metals and ceramic materials.